Embedded photonic structures fabricated in photosensitive glass using proton beam writing

Abstract

In this paper, we present a method that utilizes a focused beam of mega electron volt (MeV) protons to fabricate embedded photonic structures in Foturan™ glass. Both direct modification via proton beam end of range damage and post irradiation heat treatment are used to make the structures. Microfluidic channels with integrated waveguides and optical diffraction gratings are made using this technique.