Electron beam-induced current imaging of ferroelectric domains and local polarization reversal in Hf0.5Zr0.5O2

Abstract

Because of their full compatibility with CMOS technology, HfO2-based ferroelectrics, and especially Hf0.5Zr0.5O2 (HZO), attract a lot of attention. However, the overwhelming majority of measurement techniques provides only information about the cumulative electrical response of many domains of HZO, i.e., at the macroscopic level. So far, only piezoresponse force microscopy technique was applied to visualize distinct ferroelectric domains in HZO and to analyze the local switching behavior in the microscopic level. This work introduces the possibility of using electron beam-induced current (EBIC) technique in the scanning electron microscope to visualize the gradual polarization reversal of HZO and to obtain the local polarization dynamics. We show that although the local EBIC signal is affected by surrounding domains, studying the variations in the ferroelectric response of individual domains as well as the spread of the local stiffness and local imprint is possible by this method. Besides, we show the connection between the EBIC current and an electric field across passive non-ferroelectric layers at interfaces between HZO and metal electrodes, which opens up additional opportunities to use the EBIC technique for investigations of interface-dependent properties of HZO ferroelectrics in the future.