Abstract
An electron beam column was designed and was used in experiments for a 50×50 mm2 deflection area. The column consists of a condenser lens, a combined focusing and double deflection system, and dynamic focus and astigmatism coils. The system successfully reduced deflective coma and transverse chromatic aberrations that could not be dynamically corrected. The dynamic coils adroitly corrected not only inherent aberrations in the column but also irregular ones produced by misalignment of the beam, column manufacturing error, and so forth. A LaB6 electron gun was employed at a brightness of 5×105A/cm2sr at 20 kV beam energy. After correction, the Gaussian beam diameter was less than 1.5 μm at 100 nA beam current in the deflection area. Test patterns including 4 μm minimum linewidths were exposed onto PMMA resist to demonstrate beam performance. Standard deviations (3σ) of the linewidths were 0.56 and 0.42 μm in the x and y directions, respectively.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
