Abstract
In this study, the authors characterized field emission for stacked-double-gate all-metal field emitter arrays (FEAs) consisting of 40 000 nanotips. After careful conditioning of the FEAs under ultrahigh vacuum and in low-pressure neon gas ambient, the authors were able to produce a highly collimated beam with a current of ∼50 μA which showed an improved beam homogeneity. The beam rms radius reduced by a factor 10 and the transverse energy spread was reduced to well below 1 eV.
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More From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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