Abstract
Electron beam induced bias was applied for high speed, high quality coating of ultra thin capacitor web. Electron beam charging applies a static charge to the film and allows higher bias voltages than conventional bias systems. Using a numerical calculation of the electrical and thermal forces at work it can be shown that electron beam bias results in better cooling and lower peak temperatures of the film. The advantages for the film coating process are higher possible coating speeds and/or better film quality. Further, the effect of pinholes during coating is much reduced.
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