Abstract
Surface defects and secondary ion formation by electron and Ar+ ion impact on SiO2, A12O3 and MgO have been studied using a combined equipment of Auger electron spectroscopy and secondary ion mass spectrometry. Both electron impact and simultaneous impact with Ar+ ions and electrons produced reduced species on the surface of SiO2and A12O3, which were not stable in the vacuum conditions employed. The Ar+ ion impact desorption cross sections of water from SiO2 and A12O3 were obtained from time dependence of the currents of the hydrogenated secondary ions, SiOH+ and AlOH+, respectively, produced by simultaneous impact with Ar+ ions and electrons.
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