Abstract
Through silicon vias are the components in three-dimensional integrated circuits, which are responsible for the vertical connection inside the dies. In this work we present studies about the reliability of open through silicon vias against electromigration. A two-step approach is followed. In the first step the stress development of a void free structure is analysed by means of simulation to find the locations, where voids due to stress are most probably nucleated. In the second step, voids are placed in the through silicon vias and their evolution is traced including the increase of resistance. The resistance raises more than linearly in time and shows an abrupt open circuit failure. These results are in good agreement with results of time accelerated electromigration tests.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.