Abstract
The paper presents a RF MEMS (Radio-Frequency-Micro-Electro-Mechanical-System) of cantilever series switch which is developed with low actuation voltage which depends upon the beam characteristics and the gap between the plane and metal beam. The MEMS series switch that designed is operating with a frequency range (0-60GHz) and it provides control of the other devices. The RF MEMS switching component consists of a electrode with tuning fork shaped which is fixed using anchor points on coplanar waveguide lines to decrease the actuation voltage and the insertion loss of the switch. The Air gap in between the tuning fork shaped electrode and actuation electrode of RF MEMS series switch is designed to boost the isolation attributes of the switch with less actuation voltage. The switching voltage for designing the switch is 18 V. The designed RF MEMS series switch can be used for sub-system level for broadband applications and communication devices.
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