Abstract
A characterization of the slot antenna microwave plasma source SIAN (slot antenna) was performed with the ECAD simulation package MAFIA (solving of Maxwell’s equations by Finite bitegration Algorithm). The most important eigenmodes of the system were identified numerically and compared with measurements of the reflection factor spectrum without plasma. For illustration, field patterns of characteristic resonances are presented. The knowledge of the eigenmodes is crucial for the understanding of the microwave system and can help to improve the power coupling with the plasma chamber and the field homogeneity in the excitation space. Even without consideration of a plasma, valuable conclusions can be drawn, especially referring to the ignition behavior of the source. Additionally, calculations were performed that took into account the plasma as a lossy medium. Measured and simulated axial distributions of the electrical field in the source operated with argon plasma are compared.
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