Abstract
Scanning mirror, as an optical vector scanning actuator, which can control the deflection and reflection of laser beam, and plays an important role in laser scanning, laser imaging and laser radar. However, the current stage of micro-electro-mechanical systems (MEMS) micromirror suffers from high cost and long preparation cycle. In order to solve these problems, a novel and lost-cost electromagnetic biaxial scanning mirror is proposed based on 3D printing and laser patterning. The mechanical structure of the biaxial scanning mirror is made of acrylonitrile butadiene styrene (ABS) material. The copper foil accurately patterned by ultraviolet (UV) laser is used as the driving coil, and the annular neodymium magnet set provides the radial magnetic field. The experimental results show that the scanning mirror can achieve vertical scanning with an optical angle of 32.4° and horizontal scanning with an optical angle of 16.5° under the resonance excitation of 119 Hz and 250 Hz, respectively. The proposed biaxial scanning mirror has the advantages of low cost and rapid preparation, which has potential applications in intelligent household, regional monitoring, industrial cameras, etc. A novel and lost-cost electromagnetic biaxial scanning mirror is proposed based on 3D printing and laser patterning. The mechanical structure of the biaxial scanning mirror is made of acrylonitrile butadiene styrene (ABS) material. The copper foil accurately patterned by ultraviolet (UV) laser is used as the driving coil, and the annular neodymium magnet set provides the radial magnetic field. The scanning mirror can achieve vertical scanning with an optical angle of 32.4° and horizontal scanning with an optical angle of 16.5°, which has low cost, short preparation cycle, and has potential applications in intelligent household, regional monitoring, industrial cameras, and intelligent household appliances. • A novel biaxial electromagnetic scanning mirror based on 3D printing and laser patterning is proposed, which has the advantages of low cost and rapid preparation. • The mechanical structure of the biaxial scanning mirror is made of acrylonitrile butadiene styrene (ABS) material. The copper foil accurately patterned by ultraviolet (UV) laser is used as the driving coil. These make the scanning mirror have lower cost and faster preparation cycle. • The scanning mirror can achieve vertical scanning with an optical angle of 32.4° and horizontal scanning with an optical angle of 16.5°. Compared with similar polymer scanning mirrors, it has a larger angle.
Published Version
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