Abstract
We present an electromagnetic analysis of diffractive optical elements (DOEs) fabricated on finite-thickness substrates. To this end we use the finite-difference time-domain (FDTD) method to solve the electromagnetic boundary value problem in the vicinity of the DOE and a semi-infinite propagation algorithm to determine the diffracted fields on the output side of the substrate. The formulation of the method and its application to the analysis of several finite-thickness diffractive lenses is presented.
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