Abstract
This work focuses on the mechanisms of alkaline electroless Ni deposition on n-type Si substrates and silicide formation by rapid thermal treatment. The deposited Ni layers were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy dispersive x-ray spectroscopy (EDS), and electron energy loss spectroscopy (EELS). The results indicate that Ni deposition occurs in two steps; a nucleation step, dominated by electrochemical processes, followed by autocatalytic deposition of Ni involving the reducing agent NaH2PO2. The oxygen content was found to be uniform in the Ni layer and was higher close to the Si/metal interface. The silicide formation from alkaline Ni deposits was characterized by 4 point probe measurements, in-situ x-ray dispersion (XRD) measurements, and TEM measurements. Results were compared to silicides formed from ‘pure’ sputtered Ni layers. It was observed that the silicide-formation temperature is higher for an electroless Ni layer than that for a sputtered Ni layer. The results suggest that the temperature ramping rate influences crystallographic phase formation.
Published Version
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