Abstract
In this work, electrohydrodynamic atomization deposition, combined with mechanical polishing, was used for the fabrication of dense and even PZT thick films. The PZT slurry was ball-milled and the effect of milling time on the characteristics of the deposited films was examined. A time of 50h was found to be the optimum milling time to produce dense films. It was found that the PZT thick films presented rough surface after deposition. In order to overcome this drawback the mechanical polishing process was employed on the deposited films. After the mechanical polishing the roughness (Ra) and peak-to-peak height (Rz) of the film surface were decreased from 422nm to 23nm and from 5µm to 150nm, respectively. Subsequently, an increase of ~10pCN−1 on piezoelectric constant (d33, f) was obtained. In addition, it was observed that the d33 was increased from 57pCN−1 to 89pCN−1 when the thickness was increased from 10µm to 80µm.
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