Abstract
This paper is focused on the design of metal (Ni) electro- thermal micro-actuators, fabricated via a single electro- plating step. Analytical and finite-element solutions of the electro-thermal and thermo-elastic problems are presented to aid in the design of the devices. A separate section is devoted to the problem of displacement determination using charge sensitive amplifiers for high-precision capacitance measurements. Finally, a possible future use of these actuators in impedance-based biosensors is outlined.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
