Abstract
This chapter is devoted to the design of electro-thermal micro-actuators with capacitive position feedback. Analytical and finite element solutions of the electro-thermal and thermo-elastic problems are presented. A separate section is devoted to the challenging problem of displacement determination using charge sensitive amplifiers for high-precision capacitance measurements. These are illustrated with examples of electronic measurement circuits tested by the authors.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
