Abstract
Finite element method (FEM) simulations are performed to investigate the sensitivity to dc magnetic fields of magnetoelectric sensors on cantilever substrates with trenches or weights at different positions. For a simple layered cantilever, a 15% higher signal voltage across the piezoelectric layer is obtained for optimally positioned electrodes and an insulating magnetostrictive material. A further 25% increase in the signal voltage is achieved for a trenched cantilever design with a pick-up region.
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