Abstract
The processes of plasma self-organization and formation of plasma structures at reduced pressures is considered with respect to the electrode microwave (2.45 GHz) discharge (EMD). The term EMD is attributed to discharge maintained near the ending of powered electrode/antenna if plasma region is less than characteristic dimensions of discharge chamber. EMD is generated at gas pressures ranged between 0.5 and 400 Torr, plasma gases are Ne, Ar, H2, N2, O2, air and mixtures containing CH4 C2H2. Electrodes/antennas of different shapes were used to ignite the discharge: solid and tube cylindrical antennas with diameter of 1-6 mm, needle, spiral and trident antennas etc. Plasma absorbed power is less than 30 W. Phenomenology of EMD is presented. Results of emission spectroscopy and probe measurements together with results of EMD modelling are described. The concept of ‘‘selfsustained - non-selfsustained’’ mechanism of EMD is concluded from analysis of publications on microwave discharges and results of study of EMD. Areas of possible EMD application are discussed.
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