Spatial structure of emission from an electrode microwave discharge in hydrogen

Abstract

The structure of electrode microwave (2.45 GHz) discharges in hydrogen with electrodes of various shapes and sizes at pressures of 1–8 torr and incident powers of 2–150 W is studied. It is found that the discharges exhibit a common feature that is independent of the antenna-electrode design: near the electrode surface, there is a thin bright sheath surrounded by a less bright, sharply bounded region, which is usually shaped like a sphere. It is suggested that the structure observed arises because the microwave field maintaining the discharge is strongly nonuniform. Near the electrode, there exists a thin dense plasma sheath with a high electron density gradient. A strong dependence of the electron-impact excitation coefficient on the electric field makes the effect even more pronounced. As the electron density decreases due to dissociative recombination, the microwave field gradient decreases and the discharge emission intensity tends to a nearly constant value. Presumably, in the boundary region of the discharge, there exists a surface wave, which increases the emission intensity at the periphery of the discharge.