Abstract
A method combining ion-beam sputtering deposition with post-annealing was proposed to prepare electrochromic WO3 thin films. It was observed that the intensity of oxygen deficiency phases can be controlled by adjusting the post-annealing temperature and time. It was also observed that as-prepared WO3 films exhibit excellent optical modulations up to 78–87%. With the increasing of oxygen deficiency intensity, the optical modulation increases accordingly. Further, the electrochromic mechanism of WO3 films was also discussed.
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