Electrochemistry and microsystems

Abstract

Electrochemistry takes a key position in products and manufacturing processes of microtechnology, which has established a multi-billion dollar market with applications in information, entertainment, medical, automotive, telecom and many other technologies. In combination with microlithographic pattern generation electrochemical deposition processes are applied in manufacturing CDs and DVDs, nozzle plates for ink jet printers, read–write heads for hard magnetic disks and solder bumps for flip-chip technology. Three-dimensional microstructures with extremely high precision and aspect ratio are manufactured by means of LIGA technology, which combines deep lithography, electroforming and moulding process steps. Field assisted etching processes with ultra-short voltage pulses, anodization of silicon and field assisted ion exchange in glass have been successfully used for generating microstructures. Meanwhile, there are a huge number of microdevices, which utilize electrochemical phenomena. ISFETs and ion sensitive electrodes are standard components in the field of microsensors, microfuel cells will become high-performance power supply systems for mobile IT and entertainment products. In communication technology electrophoresis-based on electronic ink displays will become more and more important products. The most challenging development is dealing with so-called labs-on-a-chip which utilize electrochemical phenomena like electrophoresis, isoelectric focussing and electroosmosis to create a novel platform for ultra-miniaturized analytics in life sciences, medical diagnosis, environmental technologies and many other areas of modern development.