Electrochemical Properties of Carbonaceous Thin Films Prepared by Plasma Chemical Vapor Deposition

Abstract

Carbonaceous thin films were prepared from acetylene and argon by plasma-assisted chemical vapor deposition (plasma CVD). The carbonaceous thin films were characterized mainly by scanning electron microscope (SEM) and Raman spectroscopy. Then their electrochemical properties were studied by cyclic voltammetry, charge-discharge measurements, and linear sweep voltammetry. From the SEM image carbonaceous thin films appeared flat and pinhole free. Crystallinity of carbonaceous thin films are affected by the applied rf power from Raman spectra. The difference of the applied rf power also affected the results of cyclic voltammetry and charge-discharge measurements. The lithium ion storage mechanism of carbonaceous thin film is discussed from the results of electrochemical measurements. © 2001 The Electrochemical Society. All rights reserved.