Abstract
A sub-micro spherical tool electrode is introduced for electrochemical micromachining (EMM), which could reduce the taper angle of the processed microstructures. An experimental setup that includes macro stages and piezo nano-positioning actuators is developed for EMM. The sub-micro spherical tool is prepared by liquid membrane pulsed electrochemical machining. The stability of the EMM process is in-process monitored by acquiring both the voltage and current signals. The machining depth achieved with the sub-micro spherical tool is 139 % of that achieved with a sharp conical tool. It is also indicated that the machining stability could also be improved with the spherical tool. Experimental results reveal that a low pulse voltage level, small pulse duration, and low electrolyte concentration decrease the machining side gap. Small tapered microstructures such as micro-cube of 30 × 30 × 0.35 μm in size and microfluidic channels with varying widths are manufactured by EMM.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: The International Journal of Advanced Manufacturing Technology
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
