Abstract
*,zEnvironmental Energy Technologies Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USAA procedure to fabricate carbon microelectrodes consisting of a patterned arrangement of interdigitated electrodes is described.Conventional semiconductor processing techniques involving photolithography to pattern photoresist layers on a Si wafer permit aconvenient method to form the interdigitated structure. The photoresist is then converted to carbon by pyrolysis. The iodine-iodideredox reaction was used to demonstrate the performance of the carbon interdigitated electrode.© 1999 The Electrochemical Society. S1099-0062(99)04-071-7. All rights reserved.Manuscript submitted April 19, 1999; revised manuscript received May 10, 1999. Available electronically July 9, 1999.
Published Version
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