Abstract
An electro-thermal-elastic model for characterizing thermal buckling behavior of nucromachined beams has been developed. These micro beams are made of heavily phosphorus-doped polysilicon by surface micromachining technology. When electrically self-heated, the clamped-clamped beams may buckle under high compressive thermal stresses. The electro-thermal and thermal-elastic responses have been analyzed separately to establish the overall electro-thermal-elastic characteristics. It is predicted that a 2 μm wide, 2.2 μm thick and 100 μm long clamped-clamped suspended micro beam will buckle under a 6 mA input current. The lateral deflection is about 2.7 μm at the center of the beam. The analytical results are consistent with experimental observations.
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