Abstract
Waveguides were fabricated by deposition of boron nitride thin films onto glass substrates by a microwave plasma enhanced chemical vapor deposition (PECVD) process. We have characterized the optical linear properties of the as-deposited layers by m-lines spectroscopy. We have used a simple method based on the shift of the synchronous angles of the guided modes to investigate the electro-optic tensor r ij using co-planar electrodes. With TM polarized light the value of r eff computed is of the order of 5 pm V −1.
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