Electro-mechanical transfer matrix modeling of piezoelectric actuators and application for elliptical flexure amplifiers

Abstract

Mechanically amplified piezoelectric actuators (APAs) can be found in many scenarios of precision engineering and instrumental devices. However, the electro-mechanical design of curvilinear APAs is difficult due to the existence of curved flexure beams and multi-domain electro-elasto dynamics. In this paper, the electro-mechanical behavior of elliptical APAs is studied by exploiting a novel electro-mechanical transfer matrix method. The motivation is to facilitate both the static and dynamic analyses of such a complex APA with curvilinear flexure beams by considering the multi-domain dynamics of piezoelectric stacks and compliant mechanisms from an electro-mechanical viewpoint. To this end, an analytical electro-elasto transfer matrix of piezoelectric stacks operating at the d33 mode is derived in the form of Taylor's series based on Timoshenko beam theory. The dynamic response spectrum of displacement and impedance for elliptical APAs are insightfully captured by such an electro-mechanical model. Different topologies of elliptical APAs are also compared and the optimal configuration is suggested. At last, a proof-of-concept prototype is fabricated and tested with a special focus on experimental evaluation of the electro-mechanical coupling model.