Abstract
Transparent capacitors of Al0.016In0.003Zn0.981O (AIZO)/Ag/AIZO/Bi2Mg2/3Nb4/3O7 (BMN)/AIZO/glass were prepared using BMN films with various thicknesses grown on AIZO/glass (Corning 1737) substrates by pulsed laser deposition. The BMN films deposited at 150 °C on the AIZO electrode exhibited a dielectric constant of 49–55, a dielectric loss of 3–7% at the frequency of 100 kHz and the leakage current densities of ∼10-8 A/cm2 at 200 kV/cm, in the range of the thickness from 50 to 200 nm. After damp heat treatment for 300 h under the condition of 85% relative humidity at 85 °C, the electrical properties in the BMN capacitors were slightly degraded. The AIZO/Ag/AIZO/BMN/AIZO capacitors maintained the optical transmittance of approximately 77% at a wavelength of 500 nm after damp heat treatment.
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