Abstract
The conduction mechanism and the reliability by a damp heat-treatment in transparent (BMN)/AIZO/glass capacitors were investigated for transparent capacitor applications. The conduction mechanism of the transparent AIZO/BMN/AIZO capacitors was governed by a Schottky emission with a Schottky barrier height of 0.25–0.53 eV. The reliability of the transparent capacitors by a damp heat-treatment was investigated for dielectric, optical, and leakage properties. The AIZO top electrode and the BMN dielectrics in the transparent capacitor structure were influenced by a damp heat-treatment for 800 h. Although the transparent capacitors were influenced by a damp heat-treatment, the dielectric, optical, and leakage properties of the capacitors satisfied the requirement for the reliability of the transparent capacitors.
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