Abstract
Nanotip-assisted microplasma devices have been fabricated and characterized in Ne, Ar, or Ne/2% Ar. The electrical properties of the glow discharge in three different environments, Ne, Ar, and Ne/2% Ar, have been examined with direct current (dc) bipolar-pulsed waveforms with frequencies from 2to20kHz at pressures from 300to800torr. The operating voltage of the nanotip-assisted microplasma devices was decreased around 10–20V compared with devices without a nanotip electrode. The 6×1cm panel-type microplasma device with nanotip electrodes revealed low discharge voltages around 300V.
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