Electrical properties of lead zirconate titanate thick films prepared by hybrid sol–gel method with multiple infiltration steps

Abstract

High-quality ferroelectric thick films are required for various piezoelectric applications including high-frequency transducers and microelectromechanical systems. In this work, we report the fabrication of dense crack-free lead zirconate titanate (PZT) thick films on Pt-coated Si substrates using commercial PZT powder dispersed in a sol–gel precursor solution without viscous additives. Preannealed films were infiltrated with the same solution and heat treated at 500 °C. Dielectric and ferroelectric properties of the films are found to be strongly dependent on the number of infiltration steps reaching sufficiently high values: dielectric constant ∼2270 and remanent polarization ∼35 μC cm −2. Moderate coercive field of 60 kV cm −1 and low dielectric loss ∼0.04 are observed in these films. Effective longitudinal piezoelectric coefficient d 33 also depends on the number of infiltrations demonstrating remanent value of ∼80 pm V −1 for eight infiltration steps. The results show the suitability of hybrid sol–gel method for the fabrication of PZT thick films for dielectric and piezoelectric applications.