Abstract
Lead zirconate titanate (PbZr0.52Ti0.48O3; PZT) thick film with a thickness of 70 µm was prepared by the electrophoretic deposition method from a raw oxide mixture of PbO, ZrO2, and TiO2. X-ray diffraction and scanning electron microscopy were used to characterize the sintered PZT thick film. Single phase PZT was observed in the films sintered at 900 °C and above. The film sintered at 1000 °C for 30 min exhibited a dielectric constant of 1050 with a dielectric loss of about 0.05 measured at 1 kHz, a maximum polarization of 29 µC/cm2, a remnant polarization of 19 µC/cm2, and a coercive field of 21 kV/cm. This simple process to form PZT thick films may also be applied to the preparation of other multicomponent ceramics and ceramic films.
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