Abstract
Metal-oxide-semiconductor capacitors that incorporate La2O3 dielectric films were deposited by radio frequency magnetron sputtering. In this work, the essential structures and electrical properties of La2O3 thin films were investigated. Capacitance–voltage, energy dispersive x-ray spectrometry, and transmission electron microscopy analyses reveal that an interfacial layer was formed, subsequently reducing the effective dielectric constant of the 700°C annealed La2O3 thin films. The dominant conduction mechanism of the Al∕La2O3∕p-Si metal-lanthanum oxide-semiconductor capacitor is space-charge-limited current from 300to465K in the accumulation mode. Three different regions, Ohm’s law region, trap-filled-limited region, and Child’s law region, were observed in the current-density–voltage (J–V) characteristics at room temperature. The activation energy of traps calculated from the Arrhenius plots was about 0.21±0.01eV. The electronic mobility, trap density, dielectric relaxation time, and density of states in the conduction band were determined from the space-charge-limited conduction at room temperature.
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