Abstract
Deep-level transient spectroscopy (DLTS) was performed to investigate the energy levels introduced inside quantum wells in the active region of a quantum cascade laser (QCL) structure. To form a simple active region, we prepared samples with GaAs/AlGaAs three and single-quantum-well (QW) structures. At least two QW levels were observed from the DLTS spectra for a three-QW structure and their activation energies were calculated to be approximaely 0.11–0.13 eV for QW1 and 0.20–0.22 eV for QW2. The positions of energy levels in multi quantum wells were slightly shifted upward by the applied electric field. In the case of a single QW, an activation energy of 0.08 eV was obtained.
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