Abstract
Nanostructure and electrical properties of iridium oxide () thin films prepared by spray pyrolysis technique (SPT) have been experimentally characterized. The effect of solution molarity (SM) and substrate temperature () on the nanostructure features and electrical conductivity of these films has been investigated. The results of X-ray diffraction (XRD) showed that all samples prepared at with different SM, appear almost in amorphous form. XRD revealed that the films deposited at were tetragonal structures with a preferential orientation along direction. Moreover, the degree of crystallinity was improved by solution molarity. Single order Voigt profile method has been used to determine the nanostructure parameters at different SM and . The dark conductivity measurements at room temperature as a function of SM were observed and the value of conductivity were slightly increases at higher SM, reaching the bulk value of 20 . The values of activation energy of and of were found to be 0.21 eV and ·, respectively.
Highlights
Among the transition metal oxide, iridium oxide has attracted considerable interest over the years owing to its wide range of applications
Ir-oxide film thicknesses prepared at two substrate temperatures (350 and 450◦C) with different solution molarity (SM) and constant deposition time (DT) of 10 minutes were measured by mechanical stylus method (MSM)
The film thicknesses of the prepared samples at Tsub = 350◦C have a higher value than those at another temperature. This is because the evaporation rate was increased at higher temperature, leading to diminished mass transport outwards the substrates, which is a decrease of film thickness
Summary
Among the transition metal oxide, iridium oxide has attracted considerable interest over the years owing to its wide range of applications. The interest of iridium oxide has been growing due to its remarkable chemical, electrochemical, and physical properties, including pHsensing [1, 2], chlorine, ammonia, or oxygen evaluation [3], neural stimulation [4], field emission cathode [5], advanced memory technology [6], and electrochromic devices and optical information storage [7]. It is used as coating for electrodes in functional electrical stimulation [8].
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