Abstract
In this study, BiFeO3 thin films were fabricated using a spin-coating technique on SrRuO3/n+-Si substrates, employing four different RE2O3 (La2O3, Pr2O3, Sm2O3, and Tm2O3) buffer layers. The investigation focused on assessing the structural and ferroelectric characteristics of these films. X-ray diffraction analysis revealed a (110) preferred orientation with a perovskite-rhombohedral structure in films with RE2O3 buffer layers. Atomic force microscopy analysis indicated smooth surfaces for these layers. Secondary ion mass spectrometry demonstrated high levels of Bi ions in films with RE2O3 buffer layers, while X-ray photoelectron spectroscopy revealed a low Fe2+/Fe3+ ratio in these layers. Notably, the film with a Sm2O3 buffer layer showed a lower leakage current (2.05 × 10−6 A/cm2) and a higher remnant polarization (43.65 μC/cm2). This improvement is attributed to Sm3+ ions fostering (110) orientation, reducing surface roughness, increasing Fe3+ content, thereby minimizing oxygen vacancies, and suppressing Fe3+ to Fe2+ valence fluctuation.
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