Electrical and dielectric characterization of Ge quantum dots embedded in MIS structure (AuPd/SiO2:Ge QDs/n-Si) grown by MBE

Abstract

Monocrystalline Germanium quantum dots (Ge QDs), grown by molecular beam epitaxy (MBE), are intricately embedded within a SiO2 oxide layer of a metal-insulator-semiconductor (MIS) structure, catering to optoelectronic applications. These monocrystalline Ge QDs exhibit high density (D ∼ 5 x 1012 cm−2), possess a spherical morphology, and an average size of 6 nm with narrow size distribution. A comprehensive investigation into the influence of these quantum dots on the electrical transport and dielectric properties of the metal-insulator-semiconductor (MIS) structure was conducted through current-voltage (I–V) spectroscopy and impedance spectroscopy. Notably, I–V measurements demonstrate that Ge QDs enhance conduction phenomena, thereby improving electrical transport within the MIS structure. Furthermore, the capacitance-voltage (C–V) and conductance-voltage (G-V) measurements, spanning the inversion and accumulation regions, demonstrate a memory effect induced by Ge QDs within the MOS structure. Extensive analysis of dielectric parameters, including permittivity (ε′), dielectric loss (ε”), dissipation factor (tanδ), as well as electrical modulus (M’ and M”), across a broad frequency range and under varying bias voltages, reveals no anomalous electrical or dielectric behavior attributable to the presence of Ge QDs in MIS structure. Consequently, these findings affirm the viability of the novel MIS structures with Ge QDs for the development of optoelectronic devices such as photodetectors or solar cells.