Elaboration and quantitative investigation of BCN‐type films by dynamic SIMS using the MCsx+ mode

Abstract

AbstractA quantitative SIMS approach using MCs+ mode has been tested on boron carbonitride type films (BCN). Thick amorphous BxCyNz films of different stoichiometries (0.46 ≤ x ≤ 0.68; 0.07 ≤ y ≤ 0.43; 0.01 ≤ z ≤ 0.26), deposited by thermal chemical vapour deposition, were used as standard samples to establish calibration curves between secondary ion intensities derived from in‐depth secondary ion mass spectroscopy analyses and compositions determined by X‐ray photoelectron spectroscopy. The matrix intensity ratios I(CCs+)/I(BCs+) and I(CCs2+)/I(BCs2+) appear linear with the concentration ratios CC:CB; ratios of I(NCs+)/I(BCs+) and I(NCs2+)/I(BCs2+) appear linear with the concentration ratio CN:CB as well. These calibration curves allow the quantification of matrix species in BCN films, in the range of studied stoichiometries and can be employed for compositional determination of unknown BCN films. Copyright © 2010 John Wiley & Sons, Ltd.