Efficient Vibration Control with a Semi-Active Vibration Absorber in a Semiconductor Fab

Abstract

In this paper a new type of semi-active vibration absorber has been developed. The vibration absorber consists of mass block, cantilever beam, magnet lock system, vibration and distance sensors, controller and servo motor. The mass block is fixed on the tip of cantilever beam, and the control process is driven by a servo motor and a transmit gears. Portion of cantilever was cut in form of gear tracks, which can be driven by servo motor through transmit gear to regulate the length of the cantilever beam, and the natural frequency of absorber will also be regulated. After the mass locates in right position (i.e. the natural frequency of absorber is in assigned condition), the magnetic lock will clamp the cantilever beam. The design has the benefit of simplified control system, and extra unknown vibration modes will be averted. A fabrication prototype of the proposed semi-active vibration absorber is constructed and tested to demonstrate the application and modeling of the new cantilever beam damper. By performing the experimental work, the semi-active vibration control system is designed not only for reduce vibration level in resonant condition, but also considered for vibration attenuation in non-resonant conditions.