Efficient scheduling approaches to time-constrained single-armed cluster tools with condition-based chamber cleaning operations

Abstract

In semiconductor manufacturing, an extremely stringent quality control is enforced for wafer fabrication processes. Consequently, cleaning operations that clear residual chemical gases and heat in the chambers are frequently performed. As one kind of cleaning operations, a purge operation which executes a cleaning operation each time a wafer is removed from a chamber is widely adopted in leading semiconductor fabrication plants. Such an operation can definitely improve the quality of wafer. However, it results in lower productivity. To make a tradeoff between quality and productivity, a condition-based chamber cleaning operation that performs a cleaning operation with the consideration of the actual state of a chamber is introduced in practice. Aiming to address the scheduling problem of time-constrained single-armed cluster tools with condition-based chamber cleaning operations, efficient scheduling approaches are proposed in this work for the first time and, algorithms for searching for a feasible schedule are also derived. Two illustrative examples are given to show the power of the approach.