Abstract
A new efficient fabrication method for an ordered metal nanodot array is developed by coupling nanoimprint method with a TiN thin-film mold and self-assembly of a metal thin-film due to thermal annealing. In this study, in order to develop a thin-film mold which possesses sufficient hardness and durability to use in the nanoimprint, we fabricate a TiN thin-film mold by the nano plastic forming, sputtering and electroplating processes. Using the fabrication method, TiN thin-film molds with different nanoscale surface structures can be developed. Furthermore, we demonstrate that the lattice- and parallel-patterned grooves can be formed on a gold thin-film by the nanoimprint with the developed TiN thin-film molds. It is found that a well-ordered gold nanodot array can be efficiently fabricated on a quartz glass substrate by annealing the gold thin-film formed by the nanoimprint.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
