Efficient fabrication of a high-aspect-ratio AFM tip by one-step exposure of a long focal depth holographic femtosecond axilens beam.

Abstract

In this Letter, we demonstrate a laser fabrication strategy that uses the long focal depth femtosecond axilens laser beam to manufacture the high-aspect-ratio (HAR) micropillars and atomic force microscopy (AFM) probes by one-step exposure. The long depth of focus is generated by modulating laser beam focused at different positions. By adjusting the exposure height, the morphology of HAR micropillars can be tuned flexibly, and the micropillar with an ultra-high aspect ratio (diameter of 1.5 µm, height of 102 µm, ${\rm AR}={70}$AR=70) can be fabricated within 10 ms which is a great challenge for other processing methods to obtain such a HAR microstructure in such a short time. In addition, the HAR micropillar is fabricated onto a cantilever to form the AFM probe. The homemade probe shows fine imaging quality. This method greatly improves the processing efficiency while ensuring the fabrication resolution which provides a powerful method for processing HAR microstructures.