Abstract
We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.
Highlights
Different dynamical principles have been investigated to enhance the sensitivity of resonator-based sensors, such as bifurcations, jumps, instabilities[15,16,17,18], higher order modes excitations[19,20], and sub-harmonic and super-harmonic resonances[21]
Electrical resonant circuits composed of inductor (L) and capacitor (C) connected in series or parallel have been employed as sensors in wide range of applications including temperature monitoring[24], chemical detection[25], and pressure sensing[26]
Many studies have explored the LC tank circuits in wide range of applications, there is a lack of thorough understanding of the potential of this technique in activating MEMS and NEMS resonators and their higher order modes
Summary
Different dynamical principles have been investigated to enhance the sensitivity of resonator-based sensors, such as bifurcations, jumps, instabilities (for example pull-in)[15,16,17,18], higher order modes excitations[19,20], and sub-harmonic and super-harmonic resonances[21]. These techniques require high actuation voltages, which often are above the standard range of conventional function generators and on-chip power supplies. The electrical resonance circuit characteristic equation is given as follow: L d2Q dt 2
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