Abstract
This article presents a simulation tool for developing and characterizing microelectromechanical systems (MEMS). Because of the heterogeneous structure of microsystems, MEMS simulation requires different grades of abstraction and needs the cooperation of different disciplines. The advantage of the demonstrated modular concept consists in the flexibility of the program structure and the reduction of costly software support by integrating commercial simulators. A novel application manager controls the different subprograms by specific drivers and ensures the data management for parametric studies. So the behaviour of complex systems and the interactions of components of MEMS can be analysed and optimized during the design process, resulting in shorter manufacturing cycles.
Published Version
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