Abstract
Silicon nitride-based light-emitting devices were fabricated with a SiNx emitting layer grown on annealed Si film of dense nano-crystalline cones. Comparative studies revealed that the patterned SiNx emitting layer, with embedding nanocrystalline Si cones and a rough surface morphology of its own, manifests a much enhanced, even doubled at sufficiently large injected current density, electroluminescence efficiency. Both the increased light-extraction capability and the effective hole-blocking by the presence of Si nanocones, the latter is favorable for the balance of carrier injection in emitting layer, are responsible for this remarkable efficiency enhancement. The current work established an alternative approach toward the fabrication of more efficient SiN-based light-emitting devices.
Published Version
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