Abstract
The effects of titanium content on the optical and mechanical properties of silica–titania hard optical films by the sol-gel technique using γ-glycidoxypropyltrimethoxysilane, methyltrimethoxysilane, and tetrapropylorthotitanate as starting materials are studied. Thermal gravimetric analysis, ultraviolet-visible spectroscopy, Fourier-transform infrared spectroscopy, and Raman spectroscopy are used to investigate the optical and structural properties of the films. The results indicate that crack-free and high transparency silica–titania film with a thickness more than 0.6 μm can be obtained by a single spin-coating process after a heat treatment at 500 °C. The hardness and Young’s modulus of the films are characterized by a nanoindenter and they show a linear dependence on titanium content. Hardness as high as 6.60 GPa is obtained in a 0.5 M titanium content film and heat treated at 800 °C. It is proposed that the high hardness of the film may be related to the carbon and titanium content in the film.
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