Abstract
The Sn-doped In2O3 (ITO) thin films with high sheet resistance for touch panels application were deposited by magnetron sputtering process. The effects of tin content on the structure, optical properties, sheet resistance, electrical repeatability, uniformity and stability of ITO thin films were deeply investigated. The ultrathin ITO thin films showed polycrystalline structure with the (222) preferred orientation and smooth surface with low surface roughness. Furthermore, the ultrathin ITO thin films demonstrated strong visible transmittance of above 85 % and had no interference ripples. The ultrathin ITO thin films with ingredient ratio of 95/05 showed stable high sheet resistance, excellent repeatability and uniformity, and could resist the influence from external environment.
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