Abstract
A model of high-overtone bulk acoustic resonators is used to study the effects of thickness deviation of elastic plates on resonance frequency spectra in planar multi-layered systems. The resonance frequency shifts induced by the thickness deviations of the elastic plates periodically vary with the resonance order, which depends on the acoustic impedance ratios of the elastic plates to piezoelectric patches. Additionally, the center lines of the frequency shift oscillations linearly change with the orders of the resonance modes, and their slopes are sensitive to the thickness deviations of the plates, which can be used to quantitatively evaluate the thickness deviations.
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