Abstract
This paper presents a novel capacitive microelectromechanical system comprising an array of elastomeric micro-pillars, which has been developed through the introduction of a coupled set of three nonlinear equations. The results have demonstrated that the new model utilizing polydimethylsiloxane is effective in reducing the actuation voltage, although this efficiency is reduced when the temperature is decreased. Moreover, the impact of frequency-dependent permittivity and its relaxation time on the vibrations of the moving electrode has been examined. The provided model and procedure can be utilized to analyze the effects of other materials on the system’s performance and to enhance its sensitivity.
Published Version
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