Abstract

Based on the Landau–Devonshire theory, the effects of texture and residual stress on the transition of ferroelectric perovskite thin films with C-axis polarization were studied where the influence of texture dispersion was considered. Using the results, the effect of residual stress on the transition temperature of textured ferroelectric film can be predicted. As an example, the influence rules of residual stress on the PbTiO 3 films with various texture types and degrees were obtained. For (001)-oriented PbTiO 3 film, the compressive stress increases the transition temperature, but tensile stress decreases the transition temperature. And the shift of the transition temperature increases with the texture degree increasing for both compressive stress and tensile stress in (001)-oriented PbTiO 3 films. For (111)-oriented PbTiO 3 film, the effects of stresses for different texture degrees on the transition temperature are different from that for (001)-oriented PbTiO 3 film. At the same residual stress level, the shift of the transition temperature in (001)-oriented PbTiO 3 film is greater than that in (111)-oriented PbTiO 3 film.

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