Effects of temperature and thickness on the fracture and mechanical properties of Si/Ge multilayers using molecular dynamics

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Abstract In this study, the mechanical properties of Si/Ge multilayer nanofilms were simulated by molecular dynamics (MD) in tensile and compression tests. The tensile test results show the fracture mechanism of the Si/Ge multilayer nanofilm. The phase transition process of the Si/Ge multilayer films is revealed by the strain energy distribution and structure distribution during the tensile test. The mechanical response of Si/Ge multilayer films is caused by size effects and critical film thickness. Furthermore, the effects of the number of layers and temperature on deformation and dynamic mechanical response are also studied.